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Trichloroethylene

Bible DictionaryIntegrated Circuit Terminology
chemical formula C2HCl3, trichloroethylene is a liquid at room temperature and was at one time widely used as a source of chlorine for furnace cleans. During the cleaning process, Nitrogen gas is bubbled through heated trichloroethylene liquid. The nitrogen gas leaves the bubbler carrying vapor of trichloroethylene into the furnace where it disassociates into carbon and chlorine. It is very important that sufficient oxygen is present during the cleaning process to suppress the formation of toxic phosgene gas. Trichloroethylene vapor pressure ranges from approximately 20mm of Hg at 0oC, 75mm of Hg at 25oC to 200mm of Hg at 50oC. The use of trichloroethylene has essentially ceased due to the carcinogenic nature of trichloroethylene.
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