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Trichloroethane

Bible DictionaryIntegrated Circuit Terminology
chemical formula C2H3Cl3, trichloroethane is a liquid at room temperature and was at one time widely used as a source of chlorine for furnace cleans. During the cleaning process, Nitrogen gas is bubbled through heated trichloroethane liquid. The nitrogen gas leaves the bubbler carrying vapor of trichloroethane into the furnace where it disassociates into carbon and chlorine. It is very important that sufficient oxygen is present during the cleaning process to suppress the formation of toxic phosgene gas. Trichloroethane vapor pressure ranges from approximately 30mm of Hg at 0oC, 130mm of Hg at 25oC to >350mm of Hg at 50oC. The use of trichloroethane has now largely ended due to ozone depletion issues.
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