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Projection Aligner

Bible DictionaryIntegrated Circuit Terminology
an alignment system in which a mask and wafer are separated by a significant distance and the mask pattern is focused onto the wafer, aligned and exposed. Projection printing was invented in 1973 and by the mid 1970s had largely replaced contact and proximity aligners.
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See also: FIT , Automation , Capacitance , WIP , BTAB

 

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