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KrF

Integrated Circuit Terminology

in the semiconductor industry, generally used to refer to an Excimer Laser that uses krypton and fluorine gases to produce an output of 248 nanometers. The light source of choice for critical levels at 250nm, 180nm and 130nm minimum linewidths.

See also: WAN , Farad , FC-AL , Frequency , U Port

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List of Terms: Terms beginning with "A", Page 1

A B C D E F G H I J K L M N O P Q R S T U V W X Y Z 3 8

1 2 3 4 5 6 7 8

A: Page 1 of 8.

ABS	ABTS	ACC
ACK	ALD	ALSTTL
AL_PA	AL_TIME	AND
AND Gate	ANSI	APCVD

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