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Arsine

Integrated Circuit Terminology

chemical formula AsH₃, arsine is a highly toxic gas with a garlic like odor and a TLV of 0.05ppm. Arsine is flammable in the range of 4.5 - 78%. Arsine is so toxic that is has been used as a chemical warfare agent. Arsine is used as a dopant gas during various CVD reactions and to create As+ ions for ion implantation.

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List of Terms: Terms beginning with "A", Page 1

A B C D E F G H I J K L M N O P Q R S T U V W X Y Z 3 8

1 2 3 4 5 6 7 8

A: Page 1 of 8.

ABS	ABTS	ACC
ACK	ALD	ALSTTL
AL_PA	AL_TIME	AND
AND Gate	ANSI	APCVD

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