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Arsenic

Bible DictionaryIntegrated Circuit Terminology
atomic symbol, As, arsenic is the 33rd element in the periodic table ( atomic number 33) with an  atomic weight of 74.9. Arsenic is a group V element making it a donor in silicon, i.e., makes silicon N-type. Arsenic has the same atomic diameter as silicon and so introduces very little strain into a silicon crystal lattice. Arsenic has a relatively low diffusivity and is widely used to create shallow doped junctions such as source/drains. Arsenic is toxic and carcinogenic.
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See also: JBOD , ULSI , FC-AV , KrF , Micron

 

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ABS
ABTS
ACC
ACK
ALD
ALSTTL
AL_PA
AL_TIME
AND
AND Gate
ANSI
APCVD

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