atomic symbol, As, arsenic is the 33rd element in the periodic table ( atomic number 33) with an atomic weight of 74.9. Arsenic is a group V element making it a donor in silicon, i.e., makes silicon N-type. Arsenic has the same atomic diameter as silicon and so introduces very little strain into a silicon crystal lattice. Arsenic has a relatively low diffusivity and is widely used to create shallow doped junctions such as source/drains. Arsenic is toxic and carcinogenic.